Tài liệu IEEE - 2nd (đọc kỹ bài đầu tiên trước khi gửi yêu cầu)

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1. The economic impact of choosing off-line, inline or in situ metrology deployment in semiconductor manufacturing
Spanos, C.J. Jula, P. Leachman, R.C.
Dept. of Electr. Eng., California Univ., Berkeley, CA, USA;
This paper appears in: Semiconductor Manufacturing Symposium, 2001 IEEE International
Publication Date: 8-10 Oct. 2001
On page(s): 37 - 40
Number of Pages: xi+523
Meeting Date: 10/08/2001 - 10/10/2001
Location: San Jose, CA
ISBN: 0-7803-6731-6
Digital Object Identifier: 10.1109/ISSM.2001.962909
Link: http://ieeexplore.ieee.org/iel5/7623/20785/00962909.pdf?arnumber=962909
2. The ROI of Metrology
Bunday, Ben Allgair, John Caldwell, Mark Archie, Chas Solecky, Eric Rice, Bryan Singh, Bhanwar Emami, Iraj
International SEMATECH Manufacturing Initiative (ISMI), Austin, TX. ben.bunday@ismi.sematech.org
This paper appears in: Semiconductor Manufacturing, 2006. ISSM 2006. IEEE International Symposium on
Publication Date: 25-27 Sept. 2006
On page(s): 387 - 390
Number of Pages: 387 - 390
Location: Tokyo, Japan
ISSN: 1523-553X
ISBN: 978-4-9904138-0-4
Digital Object Identifier: 10.1109/ISSM.2006.4493115
Date Published in Issue: 2008-04-18 16:34:07.0
Link: http://ieeexplore.ieee.org/iel5/4479864/4492987/04493115.pdf?tp=&arnumber=4493115&isnumber=4492987
3. Value-Added Metrology
Bunday, B.; Allgair, J.; Caldwell, M.; Solecky, E.; Archie, C.; Rice, B.; Singh, B.; Cain, J.; Emami, I.;
Semiconductor Manufacturing, IEEE Transactions on
Volume 20, Issue 3, Aug. 2007 Page(s):266 - 277
Digital Object Identifier 10.1109/TSM.2007.901851
Link: http://ieeexplore.ieee.org/iel5/66/4285815/04285816.pdf?tp=&arnumber=4285816&isnumber=4285815
4. Mass Metrology for controlling and understanding processes
Kunnen, E.; Vecchio, G.; Redolfi, A.; Everaert, J.-L.; Delabie, A.; Xiaoping Shi; Vanhaelemeersch, S.; Cunnane, L.; Kiermansz, A.;
Semiconductor Manufacturing, 2007. ISSM 2007. International Symposium on
15-17 Oct. 2007 Page(s):1 - 3
Digital Object Identifier 10.1109/ISSM.2007.4446853
Link: http://ieeexplore.ieee.org/iel5/4444476/4446780/04446853.pdf?tp=&arnumber=4446853&isnumber=4446780
5. Implementation Considerations of Various Virtual Metrology Algorithms
Yu-Chuan Su; Tung-Ho Lin; Fan-Tien Cheng; Wei-Ming Wu;
Automation Science and Engineering, 2007. CASE 2007. IEEE International Conference on
22-25 Sept. 2007 Page(s):276 - 281
Digital Object Identifier 10.1109/COASE.2007.4341740
Link: http://ieeexplore.ieee.org/iel5/4341639/4341640/04341740.pdf?tp=&arnumber=4341740&isnumber=4341640
6. Virtual Metrology Technique for Semiconductor Manufacturing
Yaw-Jen Chang; Yuan Kang; Chih-Liang Hsu; Chi-Tim Chang; Tat Yan Chan;
Neural Networks, 2006. IJCNN ''''''''06. International Joint Conference on
16-21 July 2006 Page(s):5289 - 5293
Link: http://ieeexplore.ieee.org/iel5/11216/36115/01716835.pdf?tp=&arnumber=1716835&isnumber=36115
7. Integrated metrology: the next generation in HVM
Kangas, E.; Finkner, L.;
Semiconductor Manufacturing, 2005. ISSM 2005, IEEE International Symposium on
13-15 Sept. 2005 Page(s):147 - 150
Digital Object Identifier 10.1109/ISSM.2005.1513320
Link: http://ieeexplore.ieee.org/iel5/10113/32408/01513320.pdf?tp=&arnumber=1513320&isnumber=32408
8. Accuracy and Real-Time Considerations for Implementing Various Virtual Metrology Algorithms
Su, Y.-C.; Lin, T.-H.; Cheng, F.-T.; Wu, W.-M.;
Semiconductor Manufacturing, IEEE Transactions on
Volume 21, Issue 3, Aug. 2008 Page(s):426 - 434
Digital Object Identifier 10.1109/TSM.2008.2001219
Link: http://ieeexplore.ieee.org/iel5/66/4589021/04589025.pdf?tp=&arnumber=4589025&isnumber=4589021
9. Metrology technology for the 70-nm node: process control through amplification and averaging microscopic changes
Diebold, A.C.;
Semiconductor Manufacturing, IEEE Transactions on
Volume 15, Issue 2, May 2002 Page(s):169 - 182
Digital Object Identifier 10.1109/66.999588
Link: http://ieeexplore.ieee.org/iel5/66/21566/00999588.pdf?tp=&arnumber=999588&isnumber=21566
10. Metrology control for an advanced 200 mm sub-micron wafer fab
Haider, S.E.; Faa-Ching Wang; Hegemann, V.; Capps, J.; Price, R.;
Electronics Manufacturing Technology Symposium, 1995. ''''''''Manufacturing Technologies - Present and Future'''''''', Seventeenth IEEE/CPMT International
2-4 Oct. 1995 Page(s):88 - 95
Digital Object Identifier 10.1109/IEMT.1995.526098
Link: http://ieeexplore.ieee.org/iel5/4023/11545/00526098.pdf?tp=&arnumber=526098&isnumber=11545
11. Metrology education for the information age
Strain, D.;
Instrumentation and Measurement Technology Conference, 1990. IMTC-90. Conference Record., 7th IEEE
13-15 Feb. 1990 Page(s):87
Digital Object Identifier 10.1109/IMTC.1990.65969
Link: http://ieeexplore.ieee.org/iel2/105/2373/00065969.pdf?tp=&arnumber=65969&isnumber=2373
12. Waferless metrology job creation
Harris, T.A.; Ridens, M.G.; Singh, B.P.; Baaklini, E.P.;
Advanced Semiconductor Manufacturing Conference and Workshop, 1995. ASMC 95 Proceedings. IEEE/SEMI 1995
13-15 Nov. 1995 Page(s):61
Digital Object Identifier 10.1109/ASMC.1995.484340
Link: Waferless metrology job creation
Harris, T.A.; Ridens, M.G.; Singh, B.P.; Baaklini, E.P.;
Advanced Semiconductor Manufacturing Conference and Workshop, 1995. ASMC 95 Proceedings. IEEE/SEMI 1995
13-15 Nov. 1995 Page(s):61
Digital Object Identifier 10.1109/ASMC.1995.484340
Link: http://ieeexplore.ieee.org/iel2/3479/10307/00484340.pdf?arnumber=484340
13. Adaptive Metrology Sampling techniques enabling higher precision in variability detection and control
Mouli, C.; Scott, M.J.;
Advanced Semiconductor Manufacturing Conference
11-12 June 2007 Page(s):12 - 17
Digital Object Identifier 10.1109/ASMC.2007.375072
Link: http://ieeexplore.ieee.org/iel5/4259214/4259215/04259238.pdf?tp=&arnumber=4259238&isnumber=4259215
14. Metrology standards for semiconductor manufacturing
Yu Guan; Tortonese, M.;
Solid-State and Integrated Circuits Technology, 2004. Proceedings. 7th International Conference on
Volume 1, 18-21 Oct. 2004 Page(s):588 - 593 vol.1
Digital Object Identifier 10.1109/ICSICT.2004.1435075
Link: http://ieeexplore.ieee.org/iel5/9804/30913/01435075.pdf?tp=&arnumber=1435075&isnumber=30913
15. Overview of NIST metrology development for the semiconductor industry
Knight, S.;
Advanced Thermal Processing of Semiconductors, 2003. RTP 2003. 11th IEEE International Conference on
23-26 Sept. 2003 Page(s):35 - 44
Link: http://ieeexplore.ieee.org/iel5/8835/27963/01249121.pdf?tp=&arnumber=1249121&isnumber=27963
16. Microeconomics of metrology, yield, and profitability in 300 mm manufacturing
Monahan, K.M.; Chatterjee, A.; Falessi, G.;
Semiconductor Manufacturing, 2000. Proceedings of ISSM 2000. The Ninth International Symposium on
26-28 Sept. 2000 Page(s):52 - 55
Digital Object Identifier 10.1109/ISSM.2000.993615
Link: http://ieeexplore.ieee.org/iel5/7795/21435/00993615.pdf?tp=&arnumber=993615&isnumber=21435
17. Variation
Boning, D.S.; Balakrishnan, K.; Hong Cai; Drego, N.; Farahanchi, A.; Gettings, K.M.; Lim Daihyun; Somani, A.; Taylor, H.; Truque, D.; Xie Xiaolin;
Semiconductor Manufacturing, IEEE Transactions on
Volume 21, Issue 1, Feb. 2008 Page(s):63 - 71
Digital Object Identifier 10.1109/TSM.2007.913194
Link: http://ieeexplore.ieee.org/iel5/66/4447295/04447297.pdf?tp=&arnumber=4447297&isnumber=4447295
18. A Review of Metrology for Nanoelectronics
Galatsis, K.; Potok, R.; Wang, K.L.;
Semiconductor Manufacturing, IEEE Transactions on
Volume 20, Issue 4, Nov. 2007 Page(s):542 - 548
Digital Object Identifier 10.1109/TSM.2007.907631
Link: http://ieeexplore.ieee.org/iel5/66/4369323/04369336.pdf?tp=&arnumber=4369336&isnumber=4369323
19. Integrated metrology and processes for semiconductor manufacturing
Ho, W.K.; Tay, A.; Lim, K.W.; Loh, A.P.; Tan, W.W.;
Industrial Electronics Society, 2005. IECON 2005. 31st Annual Conference of IEEE
6-10 Nov. 2005 Page(s):6 pp.
Digital Object Identifier 10.1109/IECON.2005.1569258
Link: http://ieeexplore.ieee.org/iel5/10487/33243/01569258.pdf?tp=&arnumber=1569258&isnumber=33243
20. Integrated process and inspection/metrology capacity planning
Gudmundsson, D.; Shanthikumar, J.G.;
Semiconductor Manufacturing, 2005. ISSM 2005, IEEE International Symposium on
13-15 Sept. 2005 Page(s):105 - 108
Digital Object Identifier 10.1109/ISSM.2005.1513308
Link: http://ieeexplore.ieee.org/iel5/10113/32408/01513308.pdf?tp=&arnumber=1513308&isnumber=32408
21. Virtual metrology: a solution for wafer to wafer advanced process control
PingHsu Chen; Wu, S.; Junshien Lin; Ko, F.; Lo, H.; Wang, J.; Yu, C.H.; Liang, M.S.;
Semiconductor Manufacturing, 2005. ISSM 2005, IEEE International Symposium on
13-15 Sept. 2005 Page(s):155 - 157
Digital Object Identifier 10.1109/ISSM.2005.1513322
Link: http://ieeexplore.ieee.org/iel5/10113/32408/01513322.pdf?tp=&arnumber=1513322&isnumber=32408
22. Evaluating Reliance Level of a Virtual Metrology System
Fan-Tien Cheng; Yeh-Tung Chen; Yu-Chuan Su; Deng-Lin Zeng;
Semiconductor Manufacturing, IEEE Transactions on
Volume 21, Issue 1, Feb. 2008 Page(s):92 - 103
Digital Object Identifier 10.1109/TSM.2007.914373
Link: http://ieeexplore.ieee.org/iel5/66/4447295/04447298.pdf?tp=&arnumber=4447298&isnumber=4447295
23. Effects of metrology load port buffering in automated 300 mm factories
Wright, R.; Shopbell, M.; Rust, K.; Sigireddy, S.;
Simulation Conference, 2002. Proceedings of the Winter
Volume 2, 8-11 Dec. 2002 Page(s):1359 - 1364 vol.2
Digital Object Identifier 10.1109/WSC.2002.1166402
Link: http://ieeexplore.ieee.org/iel5/8343/26292/01166402.pdf?tp=&arnumber=1166402&isnumber=26292
Cà?m ơn bàc nhiĂ?u. Mong bàc khò?e mành giùp anh em
Được ngr040 sửa chữa / chuyfn vĂo 12:16 ngĂy 07/08/2008
Được ngr040 sửa chữa / chuyfn vĂo 12:18 ngĂy 07/08/2008
Được ngr040 sửa chữa / chuyển vào 12:21 ngày 07/08/2008

Gửi bác docat.
Nhờ bác docat down giúp e một số tài liệu sau. Cám ơn bác rất nhiều trong thời gian qua đã down một số lượng lớn các tài liệu trên I3E cho anh em trên diễn đàn.
[1] Improved DSP-controlled online UPS system with high real output power.
http://ieeexplore.ieee.org/search/freesrchabstract.jsp?arnumber=1262757&isnumber=28236&punumber=2194&k2dockey=1262757@ieejrns&query=ups%3Cin%3Emetadata&pos=17
[2] A transformerless single phase on-line UPS with 110 V/220 V input output voltage
http://ieeexplore.ieee.org/search/freesrchabstract.jsp?arnumber=1620561&isnumber=33947&punumber=10769&k2dockey=1620561@ieeecnfs&query=ups%3Cin%3Emetadata&pos=24
[3] A single-phase UPS system based on TRINIT/sup y/ converter topology using voltage-regulated current-controlled feedback control approach
http://ieeexplore.ieee.org/search/freesrchabstract.jsp?arnumber=1354729&isnumber=29758&punumber=9371&k2dockey=1354729@ieeecnfs&query=ups%3Cin%3Emetadata&pos=3
[4] DSP-embedded UPS controller for high-performance single-phase on-line UPS systems
http://ieeexplore.ieee.org/search/freesrchabstract.jsp?arnumber=1187519&isnumber=26598&punumber=8430&k2dockey=1187519@ieeecnfs&query=ups%3Cin%3Emetadata&pos=16
[5] Novel topology of a line interactive UPS using PQR instantaneous power theory
http://ieeexplore.ieee.org/search/freesrchabstract.jsp?arnumber=1348786&isnumber=29652&punumber=9338&k2dockey=1348786@ieeecnfs&query=ups%3Cin%3Emetadata&pos=5
[6] A study on a single-phase module UPS using a three-arms converter and inverter
http://ieeexplore.ieee.org/search/freesrchabstract.jsp?arnumber=1185460&isnumber=26590&punumber=8430&k2dockey=1185460@ieeecnfs&query=ups%3Cin%3Emetadata&pos=10
[7] Analysis and design of a multiple feedback loop control strategy for single-phase voltage-source UPS inverters
http://ieeexplore.ieee.org/search/freesrchabstract.jsp?arnumber=506118&isnumber=11012&punumber=63&k2dockey=506118@ieeejrns&query=ups%3Cin%3Emetadata&pos=24
[8] Advanced Synchronous Reference Frame Controller for Three-phase UPS Powering Unbalanced and Nonlinear Loads
http://ieeexplore.ieee.org/search/freesrchabstract.jsp?arnumber=1581859&isnumber=33408&punumber=10552&k2dockey=1581859@ieeecnfs&query=ups%3Cin%3Emetadata&pos=11
[9] Development of economical UPS system having active filter across DC-bus
http://ieeexplore.ieee.org/search/freesrchabstract.jsp?arnumber=1665542&isnumber=34861&punumber=11048&k2dockey=1665542@ieeecnfs&query=ups%3Cin%3Emetadata&pos=12
[10]The control system for uninterruptible power supply
http://ieeexplore.ieee.org/search/freesrchabstract.jsp?arnumber=939150&isnumber=20322&punumber=7477&k2dockey=939150@ieeecnfs&query=microcontroller%3Cin%3Emetadata&pos=19
[11] A PIC-Based Microcontroller Design Laboratory
http://ieeexplore.ieee.org/search/freesrchabstract.jsp?arnumber=4155262&isnumber=4155237&punumber=4155236&k2dockey=4155262@ieeecnfs&query=microcontroller%3Cin%3Emetadata&pos=0
[12] DSP-Based Stepping Motor Drivers for the LHC Collimators
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[13] Application of Velocity Profile Generation and Closed-Loop Control in Step Motor Control System
http://ieeexplore.ieee.org/search/freesrchabstract.jsp?arnumber=4108386&isnumber=4108014&punumber=4108013&k2dockey=4108386@ieeecnfs&query=step+motor+driver%3Cin%3Emetadata&pos=2
[14]Digital redesign of a stepping motor driver
http://ieeexplore.ieee.org/search/freesrchabstract.jsp?arnumber=1195302&isnumber=26881&punumber=8505&k2dockey=1195302@ieeecnfs&query=step+motor+driver%3Cin%3Emetadata&pos=4
[15] A phase/frequency-locked controller for stepping servo control systems
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[16] A study on stepping servo control system by phase-locked technique
http://ieeexplore.ieee.org/search/freesrchabstract.jsp?arnumber=239356&isnumber=6141&punumber=533&k2dockey=239356@ieeecnfs&query=step+motor+driver%3Cin%3Emetadata&pos=6

@aphi2000, mamaso, ngr040: đã có tài liệu cho các bạn.
http://www.esnips.com/web/anhthodiensStuff
@all: theo docat thì mỗi lần request các bạn nên đưa ra 1 số lượng tài liệu vừa phải. Nếu số lượng tài liệu quá nhiều thì các bạn chia thành nhiều lần, lọc những tài liệu cần thiết và quan trọng để request trước. Với những bài báo trên I3E thì cũng ko đơn giản để đọc & hiểu trong 1 sớm 1 chiều được.
Cheer

Docat cố lên. Bà con ở đây tham lam lắm.
nghichnham cũng thấy đọc đc một bài báo cho ra hồn khá là mệt. Thế mà nhiều người cứ order ầm ầm. Chả hiểu họ đọc kiểu gì!?!

@nghichnham, docat,
các bác thông cảm. Đúng là các bài trên I3E đọc hiểu được trọn vẹn là rất khó. Có thể đọc cả bài mà chẳng hiểu họ làm gì, thế nhưng bọn e ko có account nên ko thể preview được bài đó họ viết gì, có trùng với vấn đề mình quan tâm ko nên đành phải nhờ các bác down tất cả về rùi xem thử. Chứ thực ra bọn e cũng chẳng thể ngồi đọc hết được tất cả những gì các bác down hộ đâu ạ. Mong các bác chụi khó giúp các anh em diễn đàn.

Đúng là kô dễ hiểu được những tài liệu đó vì nhiều tài liệu cần thời gian 1-2 h năm nghiên cứu mới ra kết quả.
Để hạn chế việc down thừa, mọi người nên đọc kỹ phần abstract, là phần ai cũng xem đc.

@thanhtieuke: đã có tài liệu cho bạn.
@nghichnham: lâu rồi mới thấy bác về chơi

Em chào bác nghichnham và bác docat, nhờ 2 bác down giúp em các bài sau với, cảm ơn 2 bác nhiều:
1. Key Performance Indices to Monitor Bidding Behaviors in Electricity Market
Liu Dun-nan; Wu ya-guang; Jiang Xiao-liang; He Guang-yu; Zhang Hua-qing
Power Systems Conference and Exposition, 2006. PSCE apos;06. 2006 IEEE PES
Volume , Issue , Oct. 29 2006-Nov. 1 2006 Page(s):1156 - 1161
Digital Object Identifier 10.1109/PSCE.2006.296471
link:
http://ieeexplore.ieee.org/Xplore/login.jsp?url=/iel5/4075697/4075698/04075910.pdf?tp=&arnumber=4075910&isnumber=4075698
2. Conjectural variation based learning of generatorapos;s behavior in electricity market
Yiqun Song; Zhijian Hou; Fushuan Wen; Yixin Ni; Wu, F.F.
Circuits and Systems, 2003. ISCAS apos;03. Proceedings of the 2003 International Symposium on
Volume 3, Issue , 25-28 May 2003 Page(s): III-403 - III-406 vol.3
link:
http://ieeexplore.ieee.org/Xplore/login.jsp?url=/iel5/8570/27130/01205041.pdf?tp=&isnumber=&arnumber=1205041
3. Pay-as-bid versus marginal pricing-part I:Strategic generator offers
Yongjun Ren; Galiana, F.D.
Power Systems, IEEE Transactions on
Volume 19, Issue 4, Nov. 2004 Page(s): 1771 - 1776
Digital Object Identifier 10.1109/TPWRS.2004.835638
link: http://ieeexplore.ieee.org/Xplore/login.jsp?url=/iel5/59/29700/01350813.pdf?arnumber=1350813
4. Optimal bidding in a multi-period electricity spot market
Beck, E.V.; Cherkaoui, R.; Germond, A.
Electric Utility Deregulation and Restructuring and Power Technologies, 2008. DRPT 2008. Third International Conference on
Volume , Issue , 6-9 April 2008 Page(s):107 - 115
Digital Object Identifier 10.1109/DRPT.2008.4523387
link: http://ieeexplore.ieee.org/Xplore/login.jsp?url=/iel5/4511470/4523365/04523387.pdf?isnumber=4523365&prod=CNF&arnumber=4523387&arSt=107&ared=115&arAuthor=Beck%2C+E.+V.%3B+Cherkaoui%2C+R.%3B+Germond%2C+A.
Em cảm ơn các bác nhiều !

Cám ơn bác docat, e đã nhận được tài liệu rùi. Nhưng chắc do em gửi request nhiều quá nên bác docat down còn thiếu 2 files số [8] và [14]. Nếu bác có thời gian thì down về giùm e. Thanks bác nhiều.